DC Magnetron Sputtering of B2 Phase Feal(111) Single-Crystal-Like Films and Hydrogen Damage Behavior

B2 ordered FeAl intermetallic is an important candidate for high-temperaturestructural materials, and its hydrogen embrittlement problem has attracted wide attentions in recent decades. In this paper, we prepared single-crystal-like B2-FeAl (111) thin films on Si (111) substrate using the conventional magnetron sputtering method, and studied the phase composition and the influences of hydrogen on FeAl (111) films by X-ray diffraction (XRD), scanning electron microscopy (SEM), Atomic force microscope (AFM) and transmission electron microscope (TEM) analysis. The preffered growth mechanism of FeAl (111) film and its hydrogen induced modification were discussed.