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Overview of Metrology for On-Chip Interconnect

Authors :
Alain C. Diebold
Source :
Handbook of Silicon Semiconductor Metrology ISBN: 9780429207655
Publication Year :
2001
Publisher :
CRC Press, 2001.

Subjects

Subjects :
Interconnection
Materials science
Electronic engineering
Metrology

Details

ISBN :
978-0-429-20765-5
ISBNs :
9780429207655
Database :
OpenAIRE
Journal :
Handbook of Silicon Semiconductor Metrology ISBN: 9780429207655
Accession number :
edsair.doi...........db304995b58209e35555b0ac673b7e76

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Authors Abstract Subjects Details