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Tunable microcavity based on III-V semiconductor micro-opto-electromechanical structures (MOEMS) with strong optical confinement
- Source :
- 1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369).
- Publication Year :
- 2002
- Publisher :
- IEEE, 2002.
-
Abstract
- The key performances of optical filters requested by optical communications for wavelength-division multiplexing (WDM) systems are: (i) a high wavelength selectivity, enabling the selection of neighboring channels 1.6 nm apart with a crosstalk ratio of 20 dB, (ii) a continuous wavelength tuning range of about 30 nm around 1.55 /spl mu/m, with no degradation of the selectivity. We demonstrate the design and the fabrication of a vertical micromachined InP-air gap based Fabry-Perot filter, continuously tunable via electrostatic micromechanical actuation of the cavity air gap, which meets the WDM system requirements.
Details
- Database :
- OpenAIRE
- Journal :
- 1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369)
- Accession number :
- edsair.doi...........db0b3b1bfa3edfd3fd67aeb1d4515891
- Full Text :
- https://doi.org/10.1109/leosst.1998.689730