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Semi-crystalline poly(4-methyl-1-pentene) polymers for replication of high aspect ratio diffractive features

Authors :
Valtteri Kalima
Samuli Siitonen
Markku Kuittinen
Mika Suvanto
Tuula T. Pakkanen
Petri Karvinen
Source :
Journal of Micromechanics and Microengineering. 18:025020
Publication Year :
2008
Publisher :
IOP Publishing, 2008.

Abstract

Two transparent semi-crystalline poly(4-methyl-1-pentene) copolymers (P4MP1) of different molar mass distributions were used for injection molding of high aspect ratio (height/width) diffractive gratings. High quality sub-micron and micron features with aspect ratios of 1.6:1 were obtained with low mold temperatures. According to SEM and AFM measurements, replication of the features depended on substrate thickness and polymer. The copolymer with lower Mn and Mw penetrated deeper into the feature cavities in thin substrates, but showed poorer thermal stability and replication fidelity.

Details

ISSN :
13616439 and 09601317
Volume :
18
Database :
OpenAIRE
Journal :
Journal of Micromechanics and Microengineering
Accession number :
edsair.doi...........daff3bfe51584effde6475ba07fa9319