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Semi-crystalline poly(4-methyl-1-pentene) polymers for replication of high aspect ratio diffractive features
- Source :
- Journal of Micromechanics and Microengineering. 18:025020
- Publication Year :
- 2008
- Publisher :
- IOP Publishing, 2008.
-
Abstract
- Two transparent semi-crystalline poly(4-methyl-1-pentene) copolymers (P4MP1) of different molar mass distributions were used for injection molding of high aspect ratio (height/width) diffractive gratings. High quality sub-micron and micron features with aspect ratios of 1.6:1 were obtained with low mold temperatures. According to SEM and AFM measurements, replication of the features depended on substrate thickness and polymer. The copolymer with lower Mn and Mw penetrated deeper into the feature cavities in thin substrates, but showed poorer thermal stability and replication fidelity.
- Subjects :
- chemistry.chemical_classification
Molar mass
Materials science
Scanning electron microscope
business.industry
Mechanical Engineering
4-Methyl-1-pentene
Replication (microscopy)
Polymer
Molding (process)
Aspect ratio (image)
Electronic, Optical and Magnetic Materials
chemistry.chemical_compound
Optics
chemistry
Mechanics of Materials
Thermal stability
Electrical and Electronic Engineering
Composite material
business
Subjects
Details
- ISSN :
- 13616439 and 09601317
- Volume :
- 18
- Database :
- OpenAIRE
- Journal :
- Journal of Micromechanics and Microengineering
- Accession number :
- edsair.doi...........daff3bfe51584effde6475ba07fa9319