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Fabrication of biaxially textured magnesium oxide thin films by ion-beam-assisted deposition
- Source :
- Thin Solid Films. 476:79-83
- Publication Year :
- 2005
- Publisher :
- Elsevier BV, 2005.
-
Abstract
- Biaxially textured MgO thin films were grown by ion-beam-assisted deposition. The film growth parameters of film thickness, ion-to-atom arrival ratio (r-value), ion beam angle, and ion beam voltage were studied. Film characterization was performed by X-ray diffraction, pole figure analysis, and atomic force microscopy (AFM). Full-width half-maximum (FWHM) of MgO (220) ϕ-scans and MgO (002) ω-scans, respectively, were used to evaluate in-plane and out-of-plane film texture. MgO (220) ϕ-scan FWHM of 3.2° and MgO (002) ω-scan FWHM of 1.2° was achieved on amorphous Si3N4-coated Si substrates using a 1500-V ion source oriented at 45° to the substrate normal and an r-value of 0.90. Depositions on metallic substrates yielded MgO (220) ϕ-scan FWHM values of 5.2° and MgO (002) ω-scan FWHM of 2.5°. Root-mean-square surface roughness of these films as measured by AFM was ≈2.3 nm.
- Subjects :
- Materials science
Ion beam
business.industry
Metals and Alloys
Analytical chemistry
Surfaces and Interfaces
Substrate (electronics)
Pole figure
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Amorphous solid
Optics
Materials Chemistry
Surface roughness
Texture (crystalline)
Thin film
business
Ion beam-assisted deposition
Subjects
Details
- ISSN :
- 00406090
- Volume :
- 476
- Database :
- OpenAIRE
- Journal :
- Thin Solid Films
- Accession number :
- edsair.doi...........daf503a48bffbcc37e60e408878878dc