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Growth defects in GeSn/Ge/Si(001) epitaxial layers grown by hot wire chemical vapor deposition of Ge with co-evaporation of Sn
- Source :
- Journal of Crystal Growth. 578:126421
- Publication Year :
- 2022
- Publisher :
- Elsevier BV, 2022.
-
Abstract
- We report on the investigation of the growth defect formation in the GeSn/Ge/Si(001) epitaxial layers grown by hot wire chemical vapor deposition of Ge with simultaneous co-evaporation of Sn from an effusion cell. The nucleation of α -Sn nanoinclusions in the course of the growth process was found to be the main mechanism of elastic strain relaxation in the Ge 1 - x Sn x epitaxial layers at x > 2.5 % as opposed to the misfit dislocation formation at the GeSn/Ge interfaces. Also, β -Sn nanoislands nucleating on the surface of the GeSn epitaxial layers with increased Sn concentration due to Sn segregation were identified by confocal Raman microscopy.
Details
- ISSN :
- 00220248
- Volume :
- 578
- Database :
- OpenAIRE
- Journal :
- Journal of Crystal Growth
- Accession number :
- edsair.doi...........dac0ff4aba4c08f343358cdc0722a96c