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Pt-doped Ni-silicide films formed by pulsed-laser annealing: Microstructural evolution and thermally robust Ni1-xPtxSi2 formation

Authors :
Jung Yeon Won
Jinyong Kim
Tae-Gon Kim
Sungho Lee
Jin-Bum Kim
Seongpyo Hong
Hyung-Ik Lee
Hyoungsub Kim
Ilgyou Shin
Hoo-Jeong Lee
Seongheum Choi
Ki-Hyun Hwang
Yihwan Kim
Taejin Park
Source :
Journal of Alloys and Compounds. 788:1013-1020
Publication Year :
2019
Publisher :
Elsevier BV, 2019.

Abstract

Pulsed-laser annealing (PLA) was performed on a preformed Pt-doped Ni-rich silicide film (Ni2Si phase), and its microstructural and phase evolution were studied from submelting to melting condition by varying the laser power density (P). Vertically nonuniform compositional profile with an interfacial intermixing was observed under a solid state reaction regime (P

Details

ISSN :
09258388
Volume :
788
Database :
OpenAIRE
Journal :
Journal of Alloys and Compounds
Accession number :
edsair.doi...........d7ac1bd392c414c03e234d57aa507ea1
Full Text :
https://doi.org/10.1016/j.jallcom.2019.02.307