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Monitoring the narrow-band pass filter deposition by calculating refractive index in real-time

Authors :
Nai-Xiang Lin
Meng-Chi Li
Cheng-Han Chiang
Shih-Fang Liao
Cheng-Chung Lee
Source :
Optical Interference Coatings 2016.
Publication Year :
2016
Publisher :
OSA, 2016.

Abstract

Optical monitoring plays an important role in film deposition. In this study, an optical monitoring method which can work out the refractive index of material in real-time improves the quality of narrow-band pass filter effectively.

Details

Database :
OpenAIRE
Journal :
Optical Interference Coatings 2016
Accession number :
edsair.doi...........d714f73e964a3619d8b4507221fe11a9