P‐6.2: Study of the Copper Corrosion by EUV and TMAH in Lithography Cleaning Process

Authors :: Lezhi Tu
Hu Wang
Shiying Sun
Zhaoning Sun
Weimin Zhang
Chaode Mo
Gao Pan
Source :: SID Symposium Digest of Technical Papers. 50:756-758
Publication Year :: 2019
Publisher :: Wiley, 2019.

Subjects :: Materials science
Scientific method
Extreme ultraviolet lithography
Metallurgy
Erosion corrosion of copper water tubes
Lithography

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