First Use of NTD Germanium-Based Microcalorimeters For High-Resolution, Broadband X-Ray Microanalysis

Broadband, high-resolution x-ray spectra from samples excited by the electron beam of a scanning electron microscope were obtained with an NTD germanium-based microcalorimeter. An energy resolution of 8 eV was used to resolve completely the silicon Kα from the tungsten Mα x-rays. This performance will make it possible to analyze efficiently the composition of thin films and surface contaminants by using low electron excitation energies.