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First Use of NTD Germanium-Based Microcalorimeters For High-Resolution, Broadband X-Ray Microanalysis
- Source :
- X-Ray Spectrometry. 26:265-268
- Publication Year :
- 1997
- Publisher :
- Wiley, 1997.
-
Abstract
- Broadband, high-resolution x-ray spectra from samples excited by the electron beam of a scanning electron microscope were obtained with an NTD germanium-based microcalorimeter. An energy resolution of 8 eV was used to resolve completely the silicon Kα from the tungsten Mα x-rays. This performance will make it possible to analyze efficiently the composition of thin films and surface contaminants by using low electron excitation energies.
Details
- ISSN :
- 10974539 and 00498246
- Volume :
- 26
- Database :
- OpenAIRE
- Journal :
- X-Ray Spectrometry
- Accession number :
- edsair.doi...........d669d80c3addc8be129b557024b9f3b9