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A Kind of Environment-Friendly Titanium Chemical Mechanical Polish Development
- Source :
- Advanced Materials Research. :1275-1279
- Publication Year :
- 2014
- Publisher :
- Trans Tech Publications, Ltd., 2014.
-
Abstract
- In this paper, fuzzy AHP to select the appropriate environment-friendly chemical mechanical polishing additives, and the rational design of the polish formulation. Practical application shows that the polish has a good anti-wear, the wear properties and anti-rust properties, stable performance ,and meets the needs of the chemical mechanical polishing, the rate of biodegradation more than 80%.
Details
- ISSN :
- 16628985
- Database :
- OpenAIRE
- Journal :
- Advanced Materials Research
- Accession number :
- edsair.doi...........d6262e9a1f29737a206e96982cf25bb8