Technologies to develop a video camera with a frame rate higher than 100 Mfps

A feasibility study is presented for an image sensor capable of image capturing at 100 Mega-frames per second (Mfps). The basic structure of the sensor is the backside-illuminated ISIS, the in-situ storage image sensor, with slanted linear CCD memories, which has already achieved 1 Mfps with very high sensitivity. There are many potential technical barriers to further increase the frame rate up to 100 Mfps, such as traveling time of electrons within a pixel, Resistive-Capacitive (RC) delay in driving voltage transfer, heat generation, heavy electro-magnetic noises, etc. For each of the barriers, a countermeasure is newly proposed and the technical and practical possibility is examined mainly by simulations. The new technical proposals include a special wafer with n and p double epitaxial layers with smoothly changing doping profiles, a design method with curves, the thunderbolt bus lines, and digitalnoiseless image capturing by the ISIS with solely sinusoidal driving voltages. It is confirmed that the integration of these technologies is very promising to realize a practical image sensor with the ultra-high frame rate.