Atomic Layer Deposition of Ultrathin Tungsten Oxide Films from WH2(Cp)2 and Ozone

Authors :: Andrey M. Markeev
Maxim G. Kozodaev
Roman I. Romanov
A. G. Chernikova
Source :: The Journal of Physical Chemistry C. 125:21663-21669
Publication Year :: 2021
Publisher :: American Chemical Society (ACS), 2021.

Subjects :: Atomic layer deposition
chemistry.chemical_compound
General Energy
Ozone
Materials science
Chemical engineering
chemistry
Tungsten oxide
Physical and Theoretical Chemistry
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

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