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Practical Aspects of Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry Analysis Enhanced by Fluorine Gas Coinjection
- Source :
- Chemistry of Materials. 33:1581-1593
- Publication Year :
- 2021
- Publisher :
- American Chemical Society (ACS), 2021.
-
Abstract
- The interest in using high vacuum-compatible time-of-flight secondary ion mass spectrometry (TOF-SIMS) detectors integrated within focused ion beam instruments (FIB) has increased due to the possib...
- Subjects :
- Materials science
Physics::Instrumentation and Detectors
General Chemical Engineering
Analytical chemistry
chemistry.chemical_element
02 engineering and technology
General Chemistry
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
Focused ion beam
0104 chemical sciences
Secondary ion mass spectrometry
Time of flight
chemistry
Materials Chemistry
Fluorine
0210 nano-technology
Subjects
Details
- ISSN :
- 15205002 and 08974756
- Volume :
- 33
- Database :
- OpenAIRE
- Journal :
- Chemistry of Materials
- Accession number :
- edsair.doi...........d5159420d0780d5bb6000f25ae3fe45d