Characterization of micro-optical components fabricated by deep-etch x-ray lithography

MLA

Jost Goettert, and Juergen Mohr. “Characterization of Micro-Optical Components Fabricated by Deep-Etch x-Ray Lithography.” SPIE Proceedings, Aug. 1991. EBSCOhost, https://doi.org/10.1117/12.45972.

APA

Jost Goettert, & Juergen Mohr. (1991). Characterization of micro-optical components fabricated by deep-etch x-ray lithography. SPIE Proceedings. https://doi.org/10.1117/12.45972

Chicago

Jost Goettert, and Juergen Mohr. 1991. “Characterization of Micro-Optical Components Fabricated by Deep-Etch x-Ray Lithography.” SPIE Proceedings, August. doi:10.1117/12.45972.