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Thermal Stress Analysis of Silicon Single Crystal during Czochralski Growth

Authors :
Tsuyoshi Munakata
Yuji Sugino
Kazumasa Fujioka
Hitoshi Uchida
Noriyuki Miyazaki
Source :
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A. 58:1953-1959
Publication Year :
1992
Publisher :
Japan Society of Mechanical Engineers, 1992.

Subjects

Subjects :
Materials science
Silicon
chemistry
Boule
Mechanics of Materials
Mechanical Engineering
chemistry.chemical_element
General Materials Science
Composite material
Single crystal

Details

ISSN :
18848338 and 03875008
Volume :
58
Database :
OpenAIRE
Journal :
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
Accession number :
edsair.doi...........d4d503013ad4299af59f54e0aada6051

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