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Thermal Stress Analysis of Silicon Single Crystal during Czochralski Growth
- Source :
- TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A. 58:1953-1959
- Publication Year :
- 1992
- Publisher :
- Japan Society of Mechanical Engineers, 1992.
Details
- ISSN :
- 18848338 and 03875008
- Volume :
- 58
- Database :
- OpenAIRE
- Journal :
- TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
- Accession number :
- edsair.doi...........d4d503013ad4299af59f54e0aada6051