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Nano-patterning of single- and bi-level surface-relief gratings using a commercial thermal scanning probe lithography system
- Source :
- 2015 Photonics North.
- Publication Year :
- 2015
- Publisher :
- IEEE, 2015.
-
Abstract
- The first commercial thermal scanning probe lithography tool is used for patterning of single- and bi-level surface-relief gratings. A modified tri-layer pattern transfer process is proposed to facilitate the fabrication of bi-level gratings.
Details
- Database :
- OpenAIRE
- Journal :
- 2015 Photonics North
- Accession number :
- edsair.doi...........d448687b93899a2f57869aaf74312d65
- Full Text :
- https://doi.org/10.1109/pn.2015.7292463