Integration of polycrystalline diamond heat spreader with AlGaN/GaN HEMTs using a dry/wet combined etching process

Subjects

Subjects :

Mechanical Engineering
Materials Chemistry
General Chemistry
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Details

ISSN :

09259635

Volume :

132

Database :

OpenAIRE

Journal :

Diamond and Related Materials

Accession number :

edsair.doi...........d4328f1e3077829f051de35d314e18a3