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The Effects of Oxygen Impurity in TMA on AIGaAs Layers Grown by MOVPE
- Source :
- Sixth International Conference Metalorganic Vapor Phase Epitaxy.
- Publication Year :
- 2005
- Publisher :
- IEEE, 2005.
Details
- Database :
- OpenAIRE
- Journal :
- Sixth International Conference Metalorganic Vapor Phase Epitaxy
- Accession number :
- edsair.doi...........d42925790a96061ddc68d53581617114
- Full Text :
- https://doi.org/10.1109/movpe.1992.664989