Improvement of bias stability of micromechanical silicon resonant accelerometer at room temperature

Authors :: 严斌 Yan Bin
董景新 Dong Jing-xin
尹永刚 Yin Yong-gang
Source :: Optics and Precision Engineering. 24:1050-1056
Publication Year :: 2016
Publisher :: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2016.

Subjects :: Materials science
Silicon
chemistry
business.industry
Electronic engineering
Optoelectronics
chemistry.chemical_element
business
Accelerometer
Stability (probability)
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

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