Development and Application of SEM-EDS Analyzer Utilizing Superconducting X-ray Detector

Authors :: Go Fujii
Shigetomo Shiki
Masataka Ohkubo
Masahiro Ukibe
Source :: Journal of the Japan Society for Precision Engineering. 86:197-200
Publication Year :: 2020
Publisher :: Japan Society for Precision Engineering, 2020.

Subjects :: Superconductivity
Soft x ray
Spectrum analyzer
Materials science
business.industry
Mechanical Engineering
X-ray detector
Superconducting tunnel junction
Optoelectronics
business

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