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Diffraction studies of submonolayer Sr structures on the Si (001) surface

Diffraction studies of submonolayer Sr structures on the Si (001) surface

Authors :
Fred Walker
Kevin F. Garrity
H. Hong
James W. Reiner
Y. Segal
Chong H. Ahn
Sohrab Ismail-Beigi
Source :
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 27:2015
Publication Year :
2009
Publisher :
American Vacuum Society, 2009.

Abstract

Using electron and synchrotron x-ray diffraction, the authors investigate the reconstructions induced on the Si (001) surface by the presence of a submonolayer of Sr atoms. These Sr surface phases on Si (001) are the first steps in the synthesis of crystalline oxide on silicon heterostructures. Through the use of in situ reflection high energy electron diffraction, the authors observe 2×1→2×3→1×2 transitions in the surface symmetry as 12 monolayer Sr is deposited at 650 °C. Anomalous synchrotron x-ray diffraction studies of the 2×3 structure are consistent with a model where each Sr atom replaces two silicon dimers, resulting in a change in the surface Si stoichiometry. X-ray diffraction from the surface formed when the Sr deposition occurs at room temperature shows a different dependence on x-ray energy and is consistent with a surface phase consisting of Sr adsorbed onto a stoichiometric Si surface.

Details

ISSN :
10711023
Volume :
27
Database :
OpenAIRE
Journal :
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Accession number :
edsair.doi...........d329291816124af575c0f36177d48952
Full Text :
https://doi.org/10.1116/1.3139866