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Nf3 And F2 Gas Fluorination of Gan Surface and Pt/Gan Interface Analyzed by Hard X-Ray Photoelectron Spectroscopy

Details

Database :
OpenAIRE
Accession number :
edsair.doi...........d2d64f18b0a3de0859ece388015831ad
Full Text :
https://doi.org/10.2139/ssrn.4409130