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Ion optics improvements to a multiple aperture ion source
- Source :
- Review of Scientific Instruments. 52:1625-1628
- Publication Year :
- 1981
- Publisher :
- AIP Publishing, 1981.
-
Abstract
- Experimental comparison is made of four plasma grids, each with a specific aperture geometry, in an attempt to improve the ion optics of a multiple aperture ion source. It is clearly shown that a simple notch geometry outperforms the other candidates with a high transmission efficiency (∼68%) to a 2° target at high perveance (∼9.6 μperv).
Details
- ISSN :
- 10897623 and 00346748
- Volume :
- 52
- Database :
- OpenAIRE
- Journal :
- Review of Scientific Instruments
- Accession number :
- edsair.doi...........d27a220b58bdebc5bfd444634d3911e5