High-efficiency bispectral laser for EUV

The results of experimental and theoretical modeling of multistage Raman conversion in compressed hydrogen with a buffer gas under using the lasing of neodymium-crystalline mediums to obtain the seed radiation for CO 2 power amplifier in the double-pulse and bispectral primary laser while maintaining efficiency of LPP EUV source are presented. This scheme allows as significantly decrease level of pumping consumption and tune a delay time up to 820 ns between a weak power (initiating a plasma cloud) and main power pulses irradiated the converter target. The lasing intensity in the focal spots was 0.2 GW/cm 2 and 5TW/cm 2 respectively for wavelengths of 1.064 μm and 9.2 μm.