Deposition of TiOx thin film using the grid-assisting magnetron sputtering

MLA

Min J. Jung, et al. “Deposition of TiOx Thin Film Using the Grid-Assisting Magnetron Sputtering.” Thin Solid Films, Jan. 2004, pp. 430–35. EBSCOhost, https://doi.org/10.1016/s0040-6090(03)01120-9.

APA

Min J. Jung, K.Yoon Bang, Yun M. Chung, Jeon G. Han, & Yong M. Kim. (2004). Deposition of TiOx thin film using the grid-assisting magnetron sputtering. Thin Solid Films, 430–435. https://doi.org/10.1016/s0040-6090(03)01120-9

Chicago

Min J. Jung, K.Yoon Bang, Yun M. Chung, Jeon G. Han, and Yong M. Kim. 2004. “Deposition of TiOx Thin Film Using the Grid-Assisting Magnetron Sputtering.” Thin Solid Films, January, 430–35. doi:10.1016/s0040-6090(03)01120-9.