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Application of quantitative X-ray phase retrieval from Fraunhofer diffraction data to nano-resolution profiling of materials
- Source :
- Optics Communications. 251:100-108
- Publication Year :
- 2005
- Publisher :
- Elsevier BV, 2005.
-
Abstract
- X-ray Fraunhofer diffraction data have been collected from a series of weakly thickness-modulated samples using a synchrotron source. Three different areas of a linear Fresnel zone structure etched in a silicon wafer each 10 μm wide were studied. Each area studied included different numbers of zones, ranging from 6 to 20. An X-ray phase retrieval technique was used to profile the complex refractive index within the areas examined. The zone structure thickness profiles were mapped with a spatial resolution of 100 nm.
- Subjects :
- Diffraction
Materials science
Fresnel zone
business.industry
Resolution (electron density)
Fraunhofer diffraction
Atomic and Molecular Physics, and Optics
Synchrotron
Electronic, Optical and Magnetic Materials
law.invention
symbols.namesake
Optics
law
symbols
Electrical and Electronic Engineering
Physical and Theoretical Chemistry
Phase retrieval
business
Image resolution
Refractive index
Subjects
Details
- ISSN :
- 00304018
- Volume :
- 251
- Database :
- OpenAIRE
- Journal :
- Optics Communications
- Accession number :
- edsair.doi...........d13ddb694feef999dc6062cf75ef89ea