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X-ray diffraction by phase diffraction gratings
- Source :
- Journal of Applied Crystallography. 48:1159-1164
- Publication Year :
- 2015
- Publisher :
- International Union of Crystallography (IUCr), 2015.
-
Abstract
- The diffraction properties of phase gratings with the period D = 1.6, 1.0 and 0.5 µm fabricated on an Si(111) crystal by e-beam lithography were studied by triple-axis X-ray diffraction. A 100 nm-thick tungsten layer was used as a phase-shift layer. It is shown that the presence of a grating as a phase-shift W layer on the surface of the Si(111) crystal causes the formation of a complicated two-dimensional diffraction pattern related to the diffraction of X-rays on the phase grating at the X-ray entrance and exit from the crystal. A model of X-ray diffraction on the W phase diffraction grating is proposed.
- Subjects :
- Materials science
business.industry
Phase-contrast X-ray imaging
Neutron diffraction
Acousto-optics
Fraunhofer diffraction
General Biochemistry, Genetics and Molecular Biology
symbols.namesake
Optics
symbols
Diffraction topography
Selected area diffraction
business
Powder diffraction
Electron backscatter diffraction
Subjects
Details
- ISSN :
- 16005767
- Volume :
- 48
- Database :
- OpenAIRE
- Journal :
- Journal of Applied Crystallography
- Accession number :
- edsair.doi...........d09b7c48746f1bad90489c53fdacbdd2