Fabrication and character of reproducible high quality steps and step-edge junctions on STO substrates

Authors :: Jihao Wang
H.-Y. Zhai
Fengzhi Xu
G H Chen
Q.S. Yang
Rong Wang
Source :: Physica C: Superconductivity and its Applications. :2471-2472
Publication Year :: 1997
Publisher :: Elsevier BV, 1997.
Abstract: We report a reproducible procedure to fabricate high quality steps and step-edge junctions on SrTiO3(STO) substrate. The dynamic process of Ion Milling(IM) was simulated in theory, there exists a maximum slope angle for the steps prepared from ion milling. For 500eV Ar+ bombarding STO system, the angle is about 73°. High quality steps can be acquired with new technique procedure. Voltage modulation is about 10μV for a typical DC-SQUIDs fabricated on this type of substrate.

Subjects :: Fabrication
Materials science
Maximum slope
business.industry
Energy Engineering and Power Technology
Nanotechnology
Substrate (electronics)
Edge (geometry)
Condensed Matter Physics
Voltage modulation
Electronic, Optical and Magnetic Materials
Quality (physics)
Optoelectronics
Electrical and Electronic Engineering
Ion milling machine
business

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