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Strain Engineering on Lithium Niobate Crystal Based SAW Resonators Through Ion Implantation
- Source :
- 2022 IEEE International Ultrasonics Symposium (IUS).
- Publication Year :
- 2022
- Publisher :
- IEEE, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- 2022 IEEE International Ultrasonics Symposium (IUS)
- Accession number :
- edsair.doi...........d0136163a3b4298af9684a7c457c8669