Pyroelectric Heat Detection for Calibrated Measurement of Atomic Layer Deposition Reaction Heat

Authors :: Emily A. Sprague-Klein
Alex B. F. Martinson
Brian T. Phelan
Ashley R. Bielinski
Source :: Chemistry of Materials. 33:6176-6185
Publication Year :: 2021
Publisher :: American Chemical Society (ACS), 2021.

Subjects :: Atomic layer deposition
Materials science
business.industry
General Chemical Engineering
Materials Chemistry
Optoelectronics
General Chemistry
business
Heat detection
Pyroelectricity

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