Back to Search
Start Over
Electromagnetic bistable microactuator fabricated on a single wafer
- Source :
- Micro & Nano Letters. 7:99
- Publication Year :
- 2012
- Publisher :
- Institution of Engineering and Technology (IET), 2012.
-
Abstract
- An electromagnetic bistable microactuator fabricated on a single wafer is presented. Its overall size is 3×3×1 mm. Tested results show that the bistable state of the device is realised by 5 V voltage pulse and held by the permanent magnet without current. The response time is 0.96 ms with a large displacement of 160 µm.
Details
- ISSN :
- 17500443
- Volume :
- 7
- Database :
- OpenAIRE
- Journal :
- Micro & Nano Letters
- Accession number :
- edsair.doi...........cf003a94bd851f9ae05e24a07e37b049