Etching front control of <110 > strips for corner compensation

In this paper a scheme of convex corner compensation for etching in aqueous KOH using only strips is presented. Turns and branches are used to control the etching front on the strip surface for better compensation quality. The design rules as well as the effects of turning and branching on the effective compensation length are presented. The etching fronts on the bottom are investigated by experiment. Applications of the new structures are shown.