A high-flow, self-filling piezoelectric pump driven by hybrid connected multiple chambers with umbrella-shaped valves

Compact pumping system of large flow rate and high output pressure with self-filling are highly desired in many fields. In this study, a multi-chamber piezoelectric pump, built with unique umbrella-shaped check valves made of silica gel, is designed and manufactured. The chambers are installed into two groups connected in series, and each group consists of two chambers parallel connected, sharing the same inlet and outlet. These four chambers have the same structure, each of which is configured with a piezoelectric actuator clamped by two seal rings, and a check valve severing as sub-inlet of each chamber. The fluid comes into the inlet of the first group and flows out through the outlet of the second group. A prototype of this kind piezoelectric pump is manufactured and assessed. The high flow rate up to 1845 ml/min and the output pressure of 32.47 KPa are achieved with the sine wave voltage of 210 V at the actuate frequency of 120 Hz, with the valve coefficient at 0.85, and the self-sucking pressure of 15.4 KPa.