Peculiarities of the structure formation of nanoscale coatings from the vacuum arc discharge plasma

Authors :: A A Lisenkov
M. I. Pikus
E A Smirnov
D. K. Kostrin
Source :: Journal of Physics: Conference Series. 789:012030
Publication Year :: 2017
Publisher :: IOP Publishing, 2017.
Abstract: In this paper features of the structure formation of nanoscale coatings (TiN)–(AlN)– (Ti–Al–N) in the vacuum arc discharge plasma are considered. The composition and structure of the formed nanoscale coatings are studied. The main factors influencing the quality of the formed coatings are shown.

Subjects :: History
Materials science
Structure formation
chemistry
Analytical chemistry
chemistry.chemical_element
Plasma
Vacuum arc
Composite material
Tin
Nanoscopic scale
Computer Science Applications
Education

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