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Organosiloxane Monolayers Terminated with Amine Groups as Adhesives for Si Metallization
- Source :
- ACS Applied Nano Materials. 3:3741-3749
- Publication Year :
- 2020
- Publisher :
- American Chemical Society (ACS), 2020.
-
Abstract
- Silicon (Si) on-chip metallization was carried out through surface functionalization and electroless deposition of copper (Cu). Surface functionalization of Si was performed by grafting an amine (N...
Details
- ISSN :
- 25740970
- Volume :
- 3
- Database :
- OpenAIRE
- Journal :
- ACS Applied Nano Materials
- Accession number :
- edsair.doi...........cce5ac54e0773741c7c6ef8292e6db1a