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Growth, Properties, and Applications of Al1-xScxN Thin Films
- Source :
- 2019 IEEE International Ultrasonics Symposium (IUS).
- Publication Year :
- 2019
- Publisher :
- IEEE, 2019.
-
Abstract
- The discovery of enhanced piezoelectricity in solid solutions of AlN and ScN is certainly one of the most important events in piezoelectric MEMS. As compared to pure AlN, it brought a crucial factor 2 to 3 improvement in a number of figures of merit governing the performance of MEMS devices. The aim of this contribution is to give a short overview on actual topics in processing, properties, and applications in RF filters and sensors.
Details
- Database :
- OpenAIRE
- Journal :
- 2019 IEEE International Ultrasonics Symposium (IUS)
- Accession number :
- edsair.doi...........cccd6d8da26932252c09088372a738e9