Scalable CMOS back-end-of-line-compatible AlScN/two-dimensional channel ferroelectric field-effect transistors

Authors :: Kwan-Ho Kim
Seyong Oh
Merrilyn Mercy Adzo Fiagbenu
Jeffrey Zheng
Pariasadat Musavigharavi
Pawan Kumar
Nicholas Trainor
Areej Aljarb
Yi Wan
Hyong Min Kim
Keshava Katti
Seunguk Song
Gwangwoo Kim
Zichen Tang
Jui-Han Fu
Mariam Hakami
Vincent Tung
Joan M. Redwing
Eric A. Stach
Roy H. Olsson
Deep Jariwala
Source :: Nature Nanotechnology.
Publication Year :: 2023
Publisher :: Springer Science and Business Media LLC, 2023.

Subjects :: Biomedical Engineering
General Materials Science
Bioengineering
Electrical and Electronic Engineering
Condensed Matter Physics
Atomic and Molecular Physics, and Optics

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