Self-formation of SiGe oxide, Ge, and void multilayers via thermal oxidation of hydrogenated epitaxial SiGe films

Authors :: Junyang An
Ruiling Gong
Xinyu Li
Ileana Florea
Lise Watrin
Pere Roca i Cabarrocas
Wanghua Chen
Source :: Vacuum. 213:112072
Publication Year :: 2023
Publisher :: Elsevier BV, 2023.

Subjects :: Condensed Matter Physics
Instrumentation
Surfaces, Coatings and Films

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