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Investigation of nanolayers' properties generated on Si surface in H2O
- Source :
- 2010 International Conference on Actual Problems of Electron Devices Engineering.
- Publication Year :
- 2010
- Publisher :
- IEEE, 2010.
-
Abstract
- This article deals with investigation of nanolayers' properties generated on Si surface in H 2 O
Details
- Database :
- OpenAIRE
- Journal :
- 2010 International Conference on Actual Problems of Electron Devices Engineering
- Accession number :
- edsair.doi...........cc5401c2a08c502994b3ced0d39ba125
- Full Text :
- https://doi.org/10.1109/apede.2010.5624036