Applications of Chromatic Confocal Technology in Precision Geometric Measurement of Workpieces

Chromatic confocal technology is increasingly applied in industries that require high-precision geometric measurements such as aerospace, naval ordnance, and medical electronics owing to its advantages in testing accuracy, real-time performance, anti-interference, and no damage to tested workpieces. This paper introduces the measurement principle of chromatic confocal technology and the structure of chromatic confocal sensors, and enumerates several typical application scenarios of the technology from the aspects of thickness measurement, profile, 3D topography scanning, roughness measurement, and wafer comprehensive parameter measurement. It also looks into potential development directions of chromatic confocal technology.