Interfacial characteristics and dielectric properties of Ba0.65Sr0.35TiO3 thin films

Authors :: Tianjin Zhang
Zhijun Ma
Juan Jiang
Xingzhong Zhao
Baishun Zhang
Ruikun Pan
Zuci Quan
Source :: Thin Solid Films. 516:999-1005
Publication Year :: 2008
Publisher :: Elsevier BV, 2008.
Abstract: Ba0.65Sr0.35TiO3 (BST) thin films were deposited on Pt/Ti/SiO2/Si substrates by radio frequency magnetron sputtering technique. X-ray photoelectron spectroscopy (XPS) depth profiling data show that each element component of the BST film possesses a uniform distribution from the outermost surface to subsurface, but obvious Ti-rich is present to BST/Pt interface because Ti4+ cations are partially reduced to form amorphous oxides such as TiOx (x

Subjects :: Materials science
Metals and Alloys
Analytical chemistry
Surfaces and Interfaces
Dielectric
Electron spectroscopy
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Amorphous solid
X-ray photoelectron spectroscopy
Sputtering
Physical vapor deposition
Materials Chemistry
Dielectric loss
Thin film

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