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Photochemical etching of copper thin films of circuit board in chlorine and trichloroethylene ambients with a KrF excimer laser

Authors :
Koichi Toyoda
Mitsuhiro Wake
Ding Xiang Wu
Source :
The Review of Laser Engineering. 18:146-152
Publication Year :
1990
Publisher :
Laser Society of Japan, 1990.

Subjects

Subjects :
Materials science
Excimer laser
Trichloroethylene
medicine.medical_treatment
chemistry.chemical_element
Photochemistry
Copper
chemistry.chemical_compound
Printed circuit board
chemistry
Etching
Copper thin film
medicine
Chlorine

Details

ISSN :
13496603 and 03870200
Volume :
18
Database :
OpenAIRE
Journal :
The Review of Laser Engineering
Accession number :
edsair.doi...........cbc93a48b8134797ab2ac50e652af81f

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