60-3:Distinguished Paper: Oxide Vertical TFTs for the Application to the Ultra High Resolution Display

The ultra-high resolution display is in demand as virtual reality (VA) and augmented reality (AR) displays, and hologram display become much more important. We present vertical TFTs for the application to the driving TFT of ultra-high resolution display. The IGZO deposited by sputtering and InOx deposited by means of plasma-enhanced atomic layer deposition (PEALD) have been adopted as the channel layers. While the IGZO vertical TFT shows on-current of 0.23 mA at Vg = 5 V and Vds = 2.1 V, that of InOx TFT shows 1.26 mA at the same driving condition.