Back to Search
Start Over
Transmitting Sensitivity Enhancement of pMUTs via Releasing Residual Stress by V-Shaped Springs
- Source :
- 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS).
- Publication Year :
- 2019
- Publisher :
- IEEE, 2019.
-
Abstract
- Residual stress can dramatically hamper the performance of piezoelectric micromachined ultrasound transducers (pMUTs), in particular the transmitting sensitivity. This paper reports a series of square pMUTs with enhanced transmitting sensitivity through V-shaped springs in different angles. The V-shaped springs can release the residual stress through self-deformation, which contributes to a flat vibrating membrane rather than a curved one. A flat vibrating membrane conduces to a large vibration amplitude. Consequently, the transmitting sensitivity of the pMUT with 150° V-shaped springs is measured as 50.9 nm/V, which is 203% higher than that of the pMUT without springs. The enhanced pMUTs have advantages in various applications of emission ultrasound.
- Subjects :
- 010302 applied physics
Materials science
Acoustics
Vibration amplitude
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Piezoelectricity
Vibration
Transducer
Residual stress
0103 physical sciences
PMUT
Ultrasonic sensor
0210 nano-technology
Sensitivity (electronics)
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi...........cba17166370e34b5b5cc8dc5671daf51