Quartz‐Based Cantilevers: Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System (Adv. Mater. Technol. 3/2021)

Authors :: Andrés Gómez
David Sánchez-Fuentes
Laura Picas
Raissa Rathar
Adrian Carretero-Genevrier
Dilek Cakiroglu
Martí Gich
Ricardo Garcia-Bermejo
Claire Jolly
Benoit Charlot
Michael Bahriz
Nicolas Maurin
Source :: Advanced Materials Technologies. 6:2170014
Publication Year :: 2021
Publisher :: Wiley, 2021.

Subjects :: Microelectromechanical systems
Cantilever
Materials science
Silicon
chemistry.chemical_element
Nanotechnology
Piezoelectricity
Industrial and Manufacturing Engineering
Soft chemistry
chemistry
Mechanics of Materials
General Materials Science
Thin film
Quartz

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