Laser-enhanced gas surface reaction of chlorine with aluminum polycrystalline surface

The supersonic molecular beam technique is used to investigate the dynamics of photochemical gas-surface reactions of Cl 2 with polycrystalline Al surface irradiated by 355- and 1064-nm laser photons. The mass and velocity distributions of desorbed reaction products are measured by time-resolved mass spectrometry. Results show that the main products are Al + and AlCl x (x=1,2,3) produced with the irradiation at 355 nm; only AlCl 3 is produced under 1064-nm laser irradiation