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Correlations between TD Annihilation and Oxygen Precipitation in Czochralski-Grown Silicon

Authors :
Manfred Reiche
J. Reichel
Source :
Materials Science Forum. :643-648
Publication Year :
1991
Publisher :
Trans Tech Publications, Ltd., 1991.

Subjects

Subjects :
Oxygen precipitation
Annihilation
Materials science
Silicon
chemistry
Mechanics of Materials
Mechanical Engineering
Analytical chemistry
chemistry.chemical_element
General Materials Science
Condensed Matter Physics

Details

ISSN :
16629752
Database :
OpenAIRE
Journal :
Materials Science Forum
Accession number :
edsair.doi...........cac10a425b843675f3f26dd7a356036f

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