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Design and fabrication of soft X-ray double frequency grating

Authors :
徐向东 Xu Xiang-dong
刘颖 Liu Ying
付绍军 Fu Shao-jun
邱克强 Qiu Ke-qiang
刘正坤 Liu Zheng-kun
Source :
Optics and Precision Engineering. 21:1780-1785
Publication Year :
2013
Publisher :
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2013.

Abstract

Applications of a soft X-ray double frequency grating shearing interferometer to laser plasma diagnostics were explored by using a soft X-ray double frequency grating as the shearing interferometric element.To improve the success rate of experiment,this paper analyzed the line parallelism and diffraction efficiency of the double frequency grating.On the basis of the relationship between the line parallelism of the double frequency grating and the interferogram of shearing interferometer,it calculated the technical requirements of line parallelism of the grating.The fabrication method was described,the line parallelism of the grating was realized with the diffraction spot position monitoring,and the moire fringe method was applied in line parallelism judgment for the grating.A double frequency grating with line parallelism less than 0.01° was fabricated.The two groups of diffraction efficiencies of-1 order for the grating were examined in spectral radiation standard and metrology beamline of Hefei National Synchrotron Radiation Laboratory,and the results show both of them are over 10% at 13.9 nm.A shearing interferometer was set up for dense plasma diagnostics,whose results demonstrate that the parallelism and diffraction efficiency of the double-frequency grating can meet the experimental requirements.

Details

ISSN :
1004924X
Volume :
21
Database :
OpenAIRE
Journal :
Optics and Precision Engineering
Accession number :
edsair.doi...........ca2b8d8c2faf1c3f53057041697d5f91
Full Text :
https://doi.org/10.3788/ope.20132107.1780