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Compact full-field hard x-ray microscope based on advanced Kirkpatrick–Baez mirrors

Authors :
Yoshiki Kohmura
Satoshi Matsuyama
Kazuhiko Omote
Jumpei Yamada
Kazuto Yamauchi
Tetsuya Ishikawa
Raita Hirose
Yoshihiro Takeda
Makina Yabashi
Source :
Optica. 7:367
Publication Year :
2020
Publisher :
Optica Publishing Group, 2020.

Abstract

X-ray full-field microscopy is a promising method for nondestructive observation of opaque materials because it can attain a high resolution and wide field of view without sample scanning. We recently developed hard x-ray objective optics, which are key devices for full-field microscopy, based on total-reflection mirrors with high throughput and achromatic properties. The objective optics consist of two types of advanced Kirkpatrick–Baez mirrors configured as crossed one-dimensional Wolter type I and type III optics. The designed optics possessed magnification factors of 42–45 with a compact camera length of approximately 2 m. The hard x-ray full-field microscope based on this system was tested at the BL29XU beamline at SPring-8. We were able to resolve 100-nm periods (50-nm line widths) of a resolution test chart at a photon energy of 15 keV over 30 h, which demonstrated the remarkable stability of this system. The image quality was preserved over a wide photon energy range from 9 to 15 keV. A periodic dot pattern with dot diameters of 300 nm, formed on a 775-µm-thick Si substrate, was three-dimensionally visualized by computed tomography.

Details

ISSN :
23342536
Volume :
7
Database :
OpenAIRE
Journal :
Optica
Accession number :
edsair.doi...........c9821c243e70836aa777de7e157a2338